Maksakova, O., Beresnev, V., Lytovchenko, S., Horokh, D., Mazilin, B., Afanasieva, I., Čaplovičova, M. and Sahul, M. 2025. Effect of Deposition Conditions on Microstructure and Composition of Nitride Monolayer and Carbide-Nitride Multilayer Coatings Based on W and Nb. East European Journal of Physics. 2 (Jun. 2025), 297-312. DOI:https://doi.org/10.26565/2312-4334-2025-2-37.