@article{Vasylyev_Kalinichenko_Strel’nitskij_2012, title={Influence of Parameters of Ion Deposition in Pulsed Mode on Characteristics of Diamondlike Coating}, url={https://periodicals.karazin.ua/eejp/article/view/13679}, abstractNote={<p>A pulsed mode of DLC coating deposition is theoretically investigated. In this mode a deposited ion flow of plasma environment with energy of <em>E<sub>0</sub> ~ </em>(20÷200)&nbsp; eV is modified by superimposing of pulsed potential <em>U</em><em> ≤ </em>1000&nbsp;V. . It was shown that intrinsic stress in a DLC coating can be decreased in several times without of essential decrease of <em>sp<sup>3</sup>-</em>bonded carbon concentration compared with DLC made in stationary mode deposition at <em>E<sub>0</sub> </em>ion energy. A method of optimization of pulsed mode parameters is proposed which is based on analysis of location of thermoelastic peaks of ions on phase <em>P,T-</em>diagram of carbon.</p&gt;}, number={1025(4)}, journal={East European Journal of Physics}, author={Vasylyev, V. and Kalinichenko, Alexandr and Strel’nitskij, Volodimir}, year={2012}, month={Nov.}, pages={102-106} }