@article{Kalinichenko_Reshetnyak_Strel’nitskij_2018, title={INFLUENCE OF BIAS POTENTIAL AND SUBSTRATE ORIENTATION ON CHARACTERISTICS OF DEPOSITED COATING: THE ROLE OF SPUTTERING}, volume={5}, url={https://periodicals.karazin.ua/eejp/article/view/10746}, DOI={10.26565/2312-4334-2018-2-07}, abstractNote={<p>Influence of atomic sputtering on intrinsic stress and growth rate of the coating made by method of plasma - ion deposition with use&nbsp;of pulsed bias potential and at different incidence angles of ions is theoretically investigated. The formula for intrinsic stress&nbsp;calculation in deposited coating obtained in the model of the nonlocal thermoelastic peak of the ion, taking into account atomic&nbsp;sputtering processes, was used to calculate the stresses in TiN and CrN coatings deposited from Ti+ and Cr+ ion beams, respectively.&nbsp;The stress value for the coatings considered correlates with the modulus of elasticity of the coating material. The stress curve&nbsp;maximum decreases and shifts to the region of higher potentials with increasing angle of incidence. This behavior is due to the&nbsp;sputtering of quasi-stable interstitial defects that determine the level of stress in the deposited coating. A formula is proposed for the&nbsp;coating deposition rate, which takes into account the sputtering of the coating atoms at arbitrary bias potential and the angle of&nbsp;incidence of the ions. It is shown that sputtering sharply reduces the coatings deposition rate and makes it impossible to deposit TiN&nbsp;and CrN coatings in the DC mode at potentials on the substrate exceeding 1.7 kV and 0.7 kV, respectively, and with normal ion&nbsp;incidence. Sputtering has the greatest influence on the intrinsic stress and the growth rate of the coating at ion deposition at inclined&nbsp;angles of incidence α = 45°...70° . The results of the calculations are compared with the available experimental data.</p&gt;}, number={2}, journal={East European Journal of Physics}, author={Kalinichenko, A. I. and Reshetnyak, E. N. and Strel’nitskij, V. E.}, year={2018}, month={Jun.}, pages={54-61} }